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A study on the crystalline orientation of sol-gel drived PZT thin films for high piezoelectric coefficient
- Jae-Hyoung Park;
- Jin Moo Byun;
- Jeong Sun Han;
- Seong Eui Lee;
- Hee Chul Lee
- 제목
- A study on the crystalline orientation of sol-gel drived PZT thin films for high piezoelectric coefficient
- 저자
- Jae-Hyoung Park; Jin Moo Byun; Jeong Sun Han; Seong Eui Lee; Hee Chul Lee
- 발행일
- 2010-04-02
- 학회명
- Korean MEMS Conference
- 개최지
- 부산
- 개최국가
- 대한민국
- 학회 개최일
- 2010-04-01 ~ 2010-04-03